"MOS Modeling Challenges for Deep Submicron CMOS" As 0.25um CMOS technology becomes widely available, circuit design and simulation face numerous challenges. These challenges also confront MOS modeling, which provides the key information link between the circuit designer and the fabrication process. This presentation will begin by examining the key aspects of deep submicron CMOS technology, including scaling in theory and in practice, the short channel limits of FET behavior, and the inability to scale the threshold voltage due to off-state power constraints. Implications for both digital and analog circuit design are considered. Detailed aspects of MOS modeling are then described, beginning with a brief discussion of the shortcomings of older MOS models (such as Level 3 and BSIM), and continuing with a detailed examination of the two most commonly-encountered MOS models, HSPICE Level 28 and BSIM3. Consideration is then given to requirements which must be imposed on new MOS models, and some emerging models are briefly discussed. Other important aspects of MOS modeling, such as the active gate capacitance and the modeling of process variations, are also considered. The presentation concludes with a brief examination of some benchmarking and pre-screening techniques which a circuit designer can use on an incoming MOS model parameter deck before employing it for circuit design.